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Laser micromachining and characterization of metal-on-glass high density pitch adapters

机译:玻璃上金属高密度螺距适配器的激光微加工和表征

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摘要

Pitch adapters (PAs) are passive electronic components widely used to adapt different pitches between silicon strip detectors and readout electronics. This paper presents an optimized process to fabricate high-density PAs using laser ablation of metal-on-glass layers. Minimum pitch sizes of 40 μm for the pads and 25 μm for the conductive traces were achieved. The resolution of the method allowed the cutting of traces as narrow as 15 μm. Different prototypes and small production series have been successfully manufactured and tested for electrical parameters, bondability, and metrology. Ageing tests were also performed to ensure long-term reliability. The production yield reached 80%. Fully functional particle detectors for high-energy physics have been assembled using these PAs, characterized and tested with lasers and radioactive sources.
机译:间距适配器(PA)是无源电子元件,广泛用于适应硅带探测器和读出电子设备之间的不同间距。本文提出了一种使用激光烧蚀玻璃上金属层制造高密度PA的优化工艺。焊盘的最小节距为40μm,导电走线的最小节距为25μm。该方法的分辨率允许切割窄至15μm的迹线。已经成功制造了不同的原型和小批量生产,并对电气参数,可粘合性和计量学进行了测试。还进行了老化测试以确保长期可靠性。产率达到80%。使用这些PA组装了用于高能物理的全功能粒子探测器,并通过激光和放射源进行了表征和测试。

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